9/24/2010	9:06:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2010	9:06:25 PM	Recipe started at 9:06 PM
9/24/2010	9:06:25 PM	H2 valve closed
9/24/2010	9:06:25 PM	BCl3 valve closed
9/24/2010	9:06:25 PM	PH3 valve closed
9/24/2010	9:06:25 PM	SiCl4 pre valve closed
9/24/2010	9:06:25 PM	SiCl4 post valve closed
9/24/2010	9:06:25 PM	Main Vac valve closed
9/24/2010	9:06:25 PM	Bypass valve closed
9/24/2010	9:06:25 PM	Bubbler valve closed
9/24/2010	9:06:25 PM	Helium valve opened
9/24/2010	9:06:25 PM	Helium MFC set to  500.000000
9/24/2010	9:06:25 PM	H2 MFC set to  0.000000
9/24/2010	9:06:25 PM	BCl3 MFC set to  0.000000
9/24/2010	9:06:25 PM	PHl3 MFC set to  0.000000
9/24/2010	9:06:25 PM	SiCl4 MFC set to  0.000000
9/24/2010	9:06:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2010	9:06:25 PM	Tube furnace set to 0
9/24/2010	9:07:45 PM	Helium valve closed
9/24/2010	9:07:45 PM	H2 valve closed
9/24/2010	9:07:45 PM	BCl3 valve closed
9/24/2010	9:07:45 PM	PH3 valve closed
9/24/2010	9:07:45 PM	SiCl4 pre valve closed
9/24/2010	9:07:45 PM	SiCl4 post valve closed
9/24/2010	9:07:45 PM	Main Vac valve closed
9/24/2010	9:07:45 PM	Bypass valve closed
9/24/2010	9:07:45 PM	Bubbler valve closed
9/24/2010	9:07:45 PM	Helium MFC set to  0.000000
9/24/2010	9:07:45 PM	H2 MFC set to  0.000000
9/24/2010	9:07:45 PM	BCl3 MFC set to  0.000000
9/24/2010	9:07:45 PM	PHl3 MFC set to  0.000000
9/24/2010	9:07:45 PM	SiCl4 MFC set to  0.000000
9/24/2010	9:07:45 PM	Bypass solenoid MFC set to  0.000000
9/24/2010	9:07:45 PM	Tube furnace set to 0
9/24/2010	9:07:45 PM	Run finished at 9:07 PM
9/24/2010	9:07:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/24/2010	9:17:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/24/2010	9:17:25 PM	Recipe started at 9:17 PM
9/24/2010	9:17:25 PM	Helium valve closed
9/24/2010	9:17:25 PM	H2 valve closed
9/24/2010	9:17:25 PM	BCl3 valve closed
9/24/2010	9:17:25 PM	PH3 valve closed
9/24/2010	9:17:25 PM	SiCl4 pre valve closed
9/24/2010	9:17:25 PM	SiCl4 post valve closed
9/24/2010	9:17:25 PM	Main Vac valve closed
9/24/2010	9:17:25 PM	Bubbler valve closed
9/24/2010	9:17:25 PM	Bypass valve opened
9/24/2010	9:17:25 PM	Helium MFC set to  0.000000
9/24/2010	9:17:25 PM	H2 MFC set to  0.000000
9/24/2010	9:17:25 PM	BCl3 MFC set to  0.000000
9/24/2010	9:17:25 PM	PHl3 MFC set to  0.000000
9/24/2010	9:17:25 PM	SiCl4 MFC set to  0.000000
9/24/2010	9:17:25 PM	Bypass solenoid MFC set to  0.000000
9/24/2010	9:17:25 PM	Tube furnace set to 0
9/24/2010	9:18:07 PM	Helium valve closed
9/24/2010	9:18:07 PM	H2 valve closed
9/24/2010	9:18:07 PM	BCl3 valve closed
9/24/2010	9:18:07 PM	PH3 valve closed
9/24/2010	9:18:07 PM	SiCl4 pre valve closed
9/24/2010	9:18:07 PM	SiCl4 post valve closed
9/24/2010	9:18:07 PM	Bubbler valve closed
9/24/2010	9:18:07 PM	Main Vac valve opened
9/24/2010	9:18:07 PM	Bypass valve opened
9/24/2010	9:18:07 PM	Helium MFC set to  0.000000
9/24/2010	9:18:07 PM	H2 MFC set to  0.000000
9/24/2010	9:18:07 PM	BCl3 MFC set to  0.000000
9/24/2010	9:18:07 PM	PHl3 MFC set to  0.000000
9/24/2010	9:18:07 PM	SiCl4 MFC set to  0.000000
9/24/2010	9:18:07 PM	Bypass solenoid MFC set to  0.000000
9/24/2010	9:18:07 PM	Tube furnace set to 0
9/24/2010	9:18:07 PM	Run finished at 9:18 PM
9/24/2010	9:18:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
